Laser Profilometer with Micron Spatial Resolution

A. O. Vardanyan; S. R. Melikyan; K. A. Movsesyan; D. L. Oganesyan; E. V. Chakhoyan

Download

Title: Laser Profilometer with Micron Spatial Resolution

Volume:

Number:

ISSN:

1829-1171

Corporate Creators:

National Institute of Metrology, Yerevan, Armenia

Coverage:

99-103

Abstract:

A new method of remote measurement of the roughness of a surface based on a non-linear optical profilometer is suggested and investigated. It is shown that for the spectral resolution of the spectrograph of 0.2 μm the linear resolution is 18 microns.

Date created:

2017-10-06

Format:

pdf

Identifier:

oai:arar.sci.am:23481

Location of original object:

ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

Subject and keywords:

Physics Electronic structure and electrical properties of surfaces Instruments, apparatus, components common to several branches of physics Optics

Object collections:

Digital Library > Articles

Last modified:

Apr 8, 2023

In our library since:

Feb 27, 2020

Number of object content hits:

All available object's versions:

https://arar.sci.am/publication/26242

Show description in RDF format:

RDF

Show description in OAI-PMH format:

OAI-PMH

Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

Edition name	Date
Laser Profilometer with Micron Spatial Resolution	Apr 8, 2023

Object

Title: Laser Profilometer with Micron Spatial Resolution

Creator:

Type:

Publication Details:

Journal or Publication Title:

Date of publication: