Publication Details:
Journal or Publication Title:
Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
Date of publication:
Volume:
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Title:
Laser Profilometer with Micron Spatial Resolution
Creator:
A. O. Vardanyan ; S. R. Melikyan ; K. A. Movsesyan ; D. L. Oganesyan ; E. V. Chakhoyan
Corporate Creators:
National Institute of Metrology, Yerevan, Armenia
Subject:
Physics ; Electronic structure and electrical properties of surfaces ; Instruments, apparatus, components common to several branches of physics ; Optics
Coverage:
Abstract:
A new method of remote measurement of the roughness of a surface based on a non-linear optical profilometer is suggested and investigated. It is shown that for the spectral resolution of the spectrograph of 0.2 μm the linear resolution is 18 microns.