On the Method of Monitoring and Optimal Control of RF-Plasma

Aghajanyan, A.; Hakhoumian, A. A.; N. Poghosyan; T. Poghosyan; T. Zakaryan

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Title: On the Method of Monitoring and Optimal Control of RF-Plasma

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1829-1171

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Institute of Radiophysics and Electronics of NAS RA

Coverage:

44-50

Abstract:

A new strategy of reaching efficient matched conditions at the maximum speed in RF power delivery systems for plasma processes is proposed and analyzed. Presented method incorporates unique properties of high speed, automatic discrete matching networks, allowing creation of shortest trajectories and bypassing inhibited states of network parameters. The special matching network model is used to test optimal matching path finder method which allows to maximize the delivered power at the minimum time.

Date created:

2015-03-13

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pdf

Identifier:

oai:arar.sci.am:23400

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ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

Subject and keywords:

Physics Instruments, apparatus, components common to several branches of physics Electronics; radiowave and microwave technology; direct energy conversion and storage

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Digital Library > Articles

Last modified:

Dec 13, 2023

In our library since:

Feb 27, 2020

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https://arar.sci.am/publication/26147

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Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

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On the Method of Monitoring and Optimal Control of RF-Plasma	Dec 13, 2023

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Title: On the Method of Monitoring and Optimal Control of RF-Plasma

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