Publication Details:
Journal or Publication Title:
Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
Date of publication:
Volume:
Number:
ISSN:
Official URL:
Title:
On the Method of Monitoring and Optimal Control of RF-Plasma
Creator:
Aghajanyan, A. ; Hakhoumian, A. A. ; N. Poghosyan ; T. Poghosyan ; T. Zakaryan
Corporate Creators:
Institute of Radiophysics and Electronics of NAS RA
Subject:
Physics ; Instruments, apparatus, components common to several branches of physics ; Electronics; radiowave and microwave technology; direct energy conversion and storage
Coverage:
Abstract:
A new strategy of reaching efficient matched conditions at the maximum speed in RF power delivery systems for plasma processes is proposed and analyzed. Presented method incorporates unique properties of high speed, automatic discrete matching networks, allowing creation of shortest trajectories and bypassing inhibited states of network parameters. The special matching network model is used to test optimal matching path finder method which allows to maximize the delivered power at the minimum time.