Object structure

Publication Details:

Established in 2008

Journal or Publication Title:

Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

Date of publication:

2015

Volume:

8

Number:

1

ISSN:

1829-1171

Official URL:


Title:

On the Method of Monitoring and Optimal Control of RF-Plasma

Creator:

Aghajanyan, A. ; Hakhoumian, A. A. ; N. Poghosyan ; T. Poghosyan ; T. Zakaryan

Corporate Creators:

Institute of Radiophysics and Electronics of NAS RA

Subject:

Physics ; Instruments, apparatus, components common to several branches of physics ; Electronics; radiowave and microwave technology; direct energy conversion and storage

Coverage:

44-50

Abstract:

A new strategy of reaching efficient matched conditions at the maximum speed in RF power delivery systems for plasma processes is proposed and analyzed. Presented method incorporates unique properties of high speed, automatic discrete matching networks, allowing creation of shortest trajectories and bypassing inhibited states of network parameters. The special matching network model is used to test optimal matching path finder method which allows to maximize the delivered power at the minimum time.

Date created:

2015-03-13

Type:

Հոդված

Format:

pdf

Location of original object:

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