Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
Institute of Radiophysics and Electronics of NAS RA
A new strategy of reaching efficient matched conditions at the maximum speed in RF power delivery systems for plasma processes is proposed and analyzed. Presented method incorporates unique properties of high speed, automatic discrete matching networks, allowing creation of shortest trajectories and bypassing inhibited states of network parameters. The special matching network model is used to test optimal matching path finder method which allows to maximize the delivered power at the minimum time.
oai:arar.sci.am:23400
ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան
Dec 13, 2023
Feb 27, 2020
21
https://arar.sci.am/publication/26147
Հրատարակութեան անունը | Թուական |
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On the Method of Monitoring and Optimal Control of RF-Plasma | Dec 13, 2023 |
H. Avagyan A. Hakhoumian H. Hayrapetyan N. Poghosyan T. Zakaryan
Hakhoumian, A. A. A. H. Makaryan N. G. Poghosyan T. V. Zakaryan Institute of Radiophysics and Electronics of NAS RA, Armenia Yerevan State University
H. Avagyan A. Hakhoumian H. Hayrapetyan N. Pogosyan T. Zakaryan
S. G. Martirosyan A. G. Ghulyan N. D. Yezakyan N. S. Mkrtchyan T. H. Lazaryan
S. B. Makarov M. V. Markosyan V. H. Avetisyan A. K. Aharonyan H. G. Martirosyan R. A. Davtyan
M. V. Markosyan V. H. Avetisyan A. K. Aharonyan R. A. Davtyan