PHYSICS BASED FULL-CHIP SCALE MODELING OF COPPER ELECTROCHEMICAL DEPOSITION

R. Ghulghazaryan; N. Khachartyan; V. Sukharev

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Title: PHYSICS BASED FULL-CHIP SCALE MODELING OF COPPER ELECTROCHEMICAL DEPOSITION

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1829-1171

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169-173

Abstract:

Full-chip multi-scale physics based pattern dependent copper electrochemical deposition models are considered.

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Date created:

2008-08-27

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pdf

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oai:arar.sci.am:23195

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ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

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Physics Materials science

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Digital Library > Articles

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Dec 13, 2023

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Feb 27, 2020

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https://arar.sci.am/publication/25897

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Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

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PHYSICS BASED FULL-CHIP SCALE MODELING OF COPPER ELECTROCHEMICAL DEPOSITION	Dec 13, 2023

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Title: PHYSICS BASED FULL-CHIP SCALE MODELING OF COPPER ELECTROCHEMICAL DEPOSITION

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