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Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
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Title:
PHYSICS BASED FULL-CHIP SCALE MODELING OF COPPER ELECTROCHEMICAL DEPOSITION
Creator:
R. Ghulghazaryan ; N. Khachartyan ; V. Sukharev
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Abstract:
Full-chip multi-scale physics based pattern dependent copper electrochemical deposition models are considered.
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