Object

Title: Single-Layer Amorphous Carbon Anti-Reflective Coatings Obtained by The Pulsed Laser Deposition Method

Publication Details:

Established in 2008

Journal or Publication Title:

Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

Date of publication:

2018

Volume:

11

Number:

4

ISSN:

1829-1171

Official URL:


Corporate Creators:

National Polytechnic University of Armenia ; Institute of Radiophysics and Electronics of NAS RA

Coverage:

278-279

Abstract:

Single-layer a-C anti-reflective coatings on the Si and GaAs substrates were obtained by using of a Q-switched nanosecond pulsed laser deposition method. It is established that single-layer a-C coatings effectively reduce the high reflection of substrates (on average to 5 % for Si and 8 % for GaAs in 400-750 nm wave range). Used by us technology for fabrication of a-C anti-reflective coatings is very simple (excludes high-energy implantation, high-temperature diffusion and deposition processes) and applied for the first time.

Date created:

2018-12-28

Format:

pdf

Identifier:

oai:arar.sci.am:23525

Location of original object:

ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

Object collections:

Last modified:

Dec 13, 2023

In our library since:

Feb 27, 2020

Number of object content hits:

36

All available object's versions:

https://arar.sci.am/publication/26293

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