Publication Details:
Journal or Publication Title:
Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
Date of publication:
Volume:
Number:
ISSN:
Official URL:
Title:
Creator:
L. Matevosyan ; G. Pluzyan ; K. Avjyan ; G. Dabaghyan
Corporate Creators:
National Polytechnic University of Armenia ; Institute of Radiophysics and Electronics of NAS RA
Subject:
Physics ; Optics ; Materials science
Coverage:
Abstract:
Single-layer a-C anti-reflective coatings on the Si and GaAs substrates were obtained by using of a Q-switched nanosecond pulsed laser deposition method. It is established that single-layer a-C coatings effectively reduce the high reflection of substrates (on average to 5 % for Si and 8 % for GaAs in 400-750 nm wave range). Used by us technology for fabrication of a-C anti-reflective coatings is very simple (excludes high-energy implantation, high-temperature diffusion and deposition processes) and applied for the first time.