Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
National Polytechnic University of Armenia ; Institute of Radiophysics and Electronics of NAS RA
Single-layer a-C anti-reflective coatings on the Si and GaAs substrates were obtained by using of a Q-switched nanosecond pulsed laser deposition method. It is established that single-layer a-C coatings effectively reduce the high reflection of substrates (on average to 5 % for Si and 8 % for GaAs in 400-750 nm wave range). Used by us technology for fabrication of a-C anti-reflective coatings is very simple (excludes high-energy implantation, high-temperature diffusion and deposition processes) and applied for the first time.
oai:arar.sci.am:23525
ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան
Dec 13, 2023
Feb 27, 2020
36
https://arar.sci.am/publication/26293
Հրատարակության անուն | Ամսաթիվ |
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Single-Layer Amorphous Carbon Anti-Reflective Coatings Obtained by The Pulsed Laser Deposition Method | Dec 13, 2023 |
V. V. Harutyunyan E. M. Aleksanyan V. C. Baghdasaryan P. B. Kostanyan G. Bondarenko M. Kirm S. Vielhauer
A. G. Ghazaryan
H. V. Baghdasaryan T. M. Knyazyan T. T. Hovhannisyan A. V. Daryan M. Marciniak
Grigoryan, B. A. V. V. Sahakyan Sargsyan, A. A. G. Zanyan T. S. Vardanyan V. M. Tsakanov
H. G. Julfayan
Bilen, S. G. A. H. Mkrtchyan L. Sh. Grigoryan H. F. Khachatryan M. Parrot A. V. Sargsyan A. R. Aramyan