Object

Title: EXPERIMENTS AND COMPUTER SIMULATION RESULTS OF ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES

Publication Details:

Established in 2008

Journal or Publication Title:

Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

Date of publication:

2009

Volume:

2

Number:

3

ISSN:

1829-1171

Official URL:


Coverage:

157-163

Abstract:

A polycrystalline Be target is submitted to the impact of 5 keV krypton ion beam. The sputtered Be particles at different angles of incidence are measured. The SRIM code and OKSANA simulation program were employed to obtain the sputtering yields of Be atoms. The angular distributions of sputtered Be particles and sputtering yields were compared each other and revealed that both of them were in a fairly good agreement. The surface morphology is observed by scanning electron micrography. The resulting differences between simulations and experiment are explained quantitatively.

Date created:

2009-10-19

Format:

pdf

Identifier:

oai:arar.sci.am:23235

Location of original object:

ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

Object collections:

Last modified:

Dec 13, 2023

In our library since:

Feb 27, 2020

Number of object content hits:

16

All available object's versions:

https://arar.sci.am/publication/25946

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