EXPERIMENTS AND COMPUTER SIMULATION RESULTS OF ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES

M. Ait El Fqih; P. G. Fournier

Download

Title: EXPERIMENTS AND COMPUTER SIMULATION RESULTS OF ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES

Հատոր:

Համար:

ISSN:

1829-1171

Պաշտոնական URL:

Ծածկույթ:

157-163

Ամփոփում:

A polycrystalline Be target is submitted to the impact of 5 keV krypton ion beam. The sputtered Be particles at different angles of incidence are measured. The SRIM code and OKSANA simulation program were employed to obtain the sputtering yields of Be atoms. The angular distributions of sputtered Be particles and sputtering yields were compared each other and revealed that both of them were in a fairly good agreement. The surface morphology is observed by scanning electron micrography. The resulting differences between simulations and experiment are explained quantitatively.

Ստեղծման ամսաթիվը:

2009-10-19

Ձևաչափ:

pdf

Նույնացուցիչ:

oai:arar.sci.am:23235

Բնօրինակի գտնվելու վայրը:

ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

Subject and keywords:

Physics Materials science

Object collections:

Digital Library > Յօդուածներ

Last modified:

Dec 13, 2023

In our library since:

Feb 27, 2020

Number of object content hits:

All available object's versions:

https://arar.sci.am/publication/25946

Show description in RDF format:

RDF

Show description in OAI-PMH format:

OAI-PMH

Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

Edition name	Date
EXPERIMENTS AND COMPUTER SIMULATION RESULTS OF ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES	Dec 13, 2023

Object

Title: EXPERIMENTS AND COMPUTER SIMULATION RESULTS OF ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES

Ստեղծողը:

Տեսակ:

Հրապարակման մանրամասներ:

Ամսագրի կամ հրապարակման վերնագիր:

Հրապարակման ամսաթիվ: