GENERATION OF NANOIMAGES BY THE WAVE METHODS

Ruben Seisyan

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Title: GENERATION OF NANOIMAGES BY THE WAVE METHODS

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1829-1171

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Coverage:

80-81

Abstract:

The implementation of wave methods to obtain the image of topological layers with regular decrease of the wavelength of the exposing (actinic) radiation turns to be the basis of micro(nano)electronics progress for its almost half a century rapid development. The limitation of resolution of optical photolithography, described by Fresnel relations for contact lithography and Rayleigh-Abby criteria for projection lithography, were resolved consequently by the transfer to projection optics with the application of DUV.

Date created:

2009-04-09

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pdf

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oai:arar.sci.am:23226

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ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

Subject and keywords:

Physics Instruments, apparatus, components common to several branches of physics Optics

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Digital Library > Articles

Last modified:

Dec 13, 2023

In our library since:

Feb 27, 2020

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https://arar.sci.am/publication/25935

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Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

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GENERATION OF NANOIMAGES BY THE WAVE METHODS	Dec 13, 2023

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Title: GENERATION OF NANOIMAGES BY THE WAVE METHODS

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