Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
Aluminum-doped ZnO nano-size films were grown on glass ceramic substrates by the high-frequency magnetron sputtering method. Investigations of the surface of films were carried out. Pt layer and gold interdigitated ohmic contacts were evaporated on prepared films by the ion-beam sputtering method. Sensitivity to different concentrations of hydrogen (10005000 ppm) in air was investigated. Measurements were carried in the temperature range 401000C. The glass ceramic/ZnO < Al > /Pt structure shows sufficient sensitivity to hydrogen at the pre-heating of the working body already up to 400С.
oai:arar.sci.am:23205
ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան
Dec 13, 2023
Feb 27, 2020
28
https://arar.sci.am/publication/25909
Edition name | Date |
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INVESTIGATION OF HYDROGEN SENSOR MADE OF ZnO < Al > THIN FILM | Dec 13, 2023 |
V. M. Aroutiounian V. M. Arakelyan V. E. Galstyan Kh. S. Martirosyan P. G. Soukiassian
V. Arakelyan V. E. Galstyan G. Shahnazaryan
V. M. Aroutiounian
V. M. Aroutiounian B. V. Mnatsakanyan
V. G. Paremuzyan V. M. Aroutiounian
K. M. Gambaryan V. M. Aroutiounian T. Boeck M. Schulze P. G. Soukiassian
V. M. Aroutiounian K. M. Gambaryan N. G. Alaverdyan A. K. Simonyan