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Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
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Title:
INVESTIGATION OF HYDROGEN SENSOR MADE OF ZnO < Al > THIN FILM
Creator:
V. E. Galstyan ; V. M. Aroutiounian ; V. M. Arakelyan ; G. E. Shahnazaryan
Subject:
Physics ; Electronic structure and electrical properties of surfaces
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Abstract:
Aluminum-doped ZnO nano-size films were grown on glass ceramic substrates by the high-frequency magnetron sputtering method. Investigations of the surface of films were carried out. Pt layer and gold interdigitated ohmic contacts were evaporated on prepared films by the ion-beam sputtering method. Sensitivity to different concentrations of hydrogen (10005000 ppm) in air was investigated. Measurements were carried in the temperature range 401000C. The glass ceramic/ZnO < Al > /Pt structure shows sufficient sensitivity to hydrogen at the pre-heating of the working body already up to 400С.
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