Object

Title: Magnetron Sputtering Techniques and Their Applications at Gas Sensors Manufacturing

Publication Details:

Established in 2008

Journal or Publication Title:

Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես

Date of publication:

2019

Volume:

12

Number:

1

ISSN:

1829-1171

Official URL:


Corporate Creators:

Yerevan State University (YSU)

Coverage:

62-77

Abstract:

The types of thin film deposition techniques and their differences are presented in this article. The characteristics of magnetron sputtering techniques are thoroughly observed. A review of recent research efforts and developments for the fabrication of semiconductor resistive gas sensors using magnetron sputtering deposition methods, presenting its potential advantages as a materials synthesis technique for gas sensors along with a discussion of their sensing performance are also presented. It can be argued that these advantages are likely to drive increased interest in the use of magnetron sputtering techniques for gas sensor materials over the next decade as the advanced physical vapor deposition (PVD) method.

Date created:

2019-04-06

Format:

pdf

Identifier:

oai:arar.sci.am:23556

Location of original object:

ՀՀ ԳԱԱ Հիմնարար գիտական գրադարան

Object collections:

Last modified:

Dec 13, 2023

In our library since:

Feb 27, 2020

Number of object content hits:

23

All available object's versions:

https://arar.sci.am/publication/26327

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