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Yerevan State University ; University of Chemistry and Technology, 5 Technica, 16628, Prague, Czech Republic ; National Bureau of Expertises SNPO, 24 Tsovakal Isakovi Ave., 0004, Yerevan, Republic of Armenia
SnO2+2at.% Co gas sensitive thin films with different thicknesses were deposited on alumina substrates and on the Multi-Sensor-Platforms by the rf magnetron sputtering method using SnO2 doped with 2 at.% Co ceramic target prepared by us. Palladium catalytic particles and interdigital gold contacts (when the alumina substrate was used) were deposited by ion beam sputtering method on the surface of the sensing layers. The response of semiconductor films to dichloroethane, dichloromethane, dimethylformamide, propylene glycol, sarin and yperit vapors was measured at different operating temperatures. It was found that the SnO2 doped with 2 at.% Co sensor with film thickness of 160 nm has high response to different concentrations of above mentioned chemical agents.