Publication Details:
Journal or Publication Title:
Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
Date of publication:
Volume:
Number:
ISSN:
Official URL:
Title:
X-Ray Elastic Constants of ZnO Thin Films
Creator:
Najmeh Ayoqi ; Abdolali Zolanvari
Corporate Creators:
Department of Physics, Faculty of Science, Arak University, Arak, 38156-8-8349, Iran
Subject:
Physics ; Electronic structure and electrical properties of surfaces
Coverage:
Abstract:
Elastic constants of zinc oxide thin films have been determined using sin2? method. Surface morphology and crystalline structure of zinc oxide were examined, using atomic force microscope (AFM) and field emission scanning electron microscope (FESEM). The different planes and lattice parameters of ZnO films were obtained by High Temperature X-Ray Diffraction (HT-XRD) method. The minimum stress and residual stress were found to be 1.27±4.88 Mpa and4.62±0.23 Mpa for (101) and (110) different atomic planes.