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Title:
EXPERIMENTS AND COMPUTER SIMULATION RESULTS OF ANGULAR DISTRIBUTION OF SPUTTERED PARTICLES
Creator:
M. Ait El Fqih ; P. G. Fournier
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Abstract:
A polycrystalline Be target is submitted to the impact of 5 keV krypton ion beam. The sputtered Be particles at different angles of incidence are measured. The SRIM code and OKSANA simulation program were employed to obtain the sputtering yields of Be atoms. The angular distributions of sputtered Be particles and sputtering yields were compared each other and revealed that both of them were in a fairly good agreement. The surface morphology is observed by scanning electron micrography. The resulting differences between simulations and experiment are explained quantitatively.