Publication Details:
Journal or Publication Title:
Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
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Title:
GENERATION OF NANOIMAGES BY THE WAVE METHODS
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Subject:
Physics ; Instruments, apparatus, components common to several branches of physics ; Optics
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Abstract:
The implementation of wave methods to obtain the image of topological layers with regular decrease of the wavelength of the exposing (actinic) radiation turns to be the basis of micro(nano)electronics progress for its almost half a century rapid development. The limitation of resolution of optical photolithography, described by Fresnel relations for contact lithography and Rayleigh-Abby criteria for projection lithography, were resolved consequently by the transfer to projection optics with the application of DUV.