Publication Details:
Journal or Publication Title:
Armenian Journal of Physics=Ֆիզիկայի հայկական հանդես
Date of publication:
Volume:
Number:
ISSN:
Official URL:
Title:
PREPARATION OF ZnO < AL > NANO-SIZE LAYERS BY MAGNETRON SPUTTERING
Creator:
Subject:
Electronic structure and electrical properties of surfaces ; Physics
Coverage:
Abstract:
Nano-dimensional thin layers of ZnO < Al > were fabricated by the magnetron sputtering. SEM images of obtained films were obtained and the dependence of the layer thickness on the sputtering time was investigated.
Table of contents:
Place of publishing:
Digitisation sponsor: