@misc{V._E._Galstyan_INVESTIGATION, author={V. E. Galstyan and V. M. Aroutiounian and V. M. Arakelyan and G. E. Shahnazaryan}, address={}, howpublished={online}, contents={}, abstract={Aluminum-doped ZnO nano-size films were grown on glass ceramic substrates by the high-frequency magnetron sputtering method. Investigations of the surface of films were carried out. Pt layer and gold interdigitated ohmic contacts were evaporated on prepared films by the ion-beam sputtering method. Sensitivity to different concentrations of hydrogen (10005000 ppm) in air was investigated. Measurements were carried in the temperature range 401000C. The glass ceramic/ZnO < Al > /Pt structure shows sufficient sensitivity to hydrogen at the pre-heating of the working body already up to 400С.}, type={Հոդված}, title={INVESTIGATION OF HYDROGEN SENSOR MADE OF ZnO < Al > THIN FILM}, keywords={Physics, Electronic structure and electrical properties of surfaces}, }