@misc{V._E._Galstyan_PREPARATION,
 author={V. E. Galstyan},
 address={},
 howpublished={online},
 contents={},
 abstract={Nano-dimensional thin layers of ZnO < Al > were fabricated by the magnetron sputtering. SEM images of obtained films were obtained and the dependence of the layer thickness on the sputtering time was investigated.},
 title={PREPARATION OF ZnO < AL > NANO-SIZE LAYERS BY MAGNETRON SPUTTERING},
 type={Conference},
 keywords={Electronic structure and electrical properties of surfaces, Physics},
}